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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions: Fundamentals, Etching, Deposition and Surface ... (Materials Science and Process Technology) Book
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.Read More
from£111.00 | RRP: * Excludes Voucher Code Discount Also available Used from £57.50
- 0815512201
- 9780815512202
- Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber
- 31 December 1990
- William Andrew
- Hardcover (Book)
- 546
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