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Lecture Notes on Principles of Plasma Processing Book
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. This title introduces basic plasma concepts to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas.Read More
from£34.90 | RRP: * Excludes Voucher Code Discount Also available Used from £43.97
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Blackwell
This short book is also ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. There is no need to wade through a thick, heavy textbook or monograph. This book contains new research results and...
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Pickabook
Francis F. Chen, Jane P. Chang
- 0306474972
- 9780306474972
- Francis F. Chen, Jane P. Chang
- 31 January 2003
- Springer
- Paperback (Book)
- 208
- Pap/Cdr
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