Plasma Etching: An Introduction (Plasma -- Materials Interactions) Book + PRICE WATCH * Amazon pricing is not included in price watch

Plasma Etching: An Introduction (Plasma -- Materials Interactions) Book

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.Read More

from£67.48 | RRP: £110.00
* Excludes Voucher Code Discount Also available Used from £46.96
  • 0124693709
  • 9780124693708
  • 8 September 1989
  • Academic Press
  • Hardcover (Book)
  • 476
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