Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing) Book + PRICE WATCH * Amazon pricing is not included in price watch

Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing) Book

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  • ASDA

    This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.

  • 1849962537
  • 9781849962537
  • Wei Gao
  • 28 June 2010
  • Springer
  • Hardcover (Book)
  • 355
  • 1st Edition.
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