Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering) Book + PRICE WATCH * Amazon pricing is not included in price watch

Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering) Book

This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).Read More

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  • 0521607671
  • 9780521607674
  • M. Elwenspoek, H. V. Jansen
  • 19 August 2004
  • Cambridge University Press
  • Paperback (Book)
  • 420
  • New Ed
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