Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications Book + PRICE WATCH * Amazon pricing is not included in price watch

Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications Book

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip...Read More

from£N/A | RRP: £29.99
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  • 052102997X
  • 9780521029971
  • David Attwood
  • 22 February 2007
  • Cambridge University Press
  • Paperback (Book)
  • 504
  • 1
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