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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications Book
This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip...Read More
from£N/A | RRP: * Excludes Voucher Code Discount Also available Used from £N/A
- 052102997X
- 9780521029971
- David Attwood
- 22 February 2007
- Cambridge University Press
- Paperback (Book)
- 504
- 1
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