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Solid-state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology (Fundmentals of Microfabrication and Nanotechnology) Book
Providing a theoretical understanding of MEMS and NEMS this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si MEMS and NEMS in a historical context it discusses crystallography quantum mechanics the band theory of solids and the silicon single crystal.Read More
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